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Instrumentation

VINSE provides access and training on start-of-the-art fabrication and characterization equipment inside Vanderbilt University’s Engineering and Science Building (ESB). Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.

Characterization

Imaging Tools

Imaging Sample Prep

Spectroscopy

Metrology

Fabrication

Deposition - Chemical

Deposition - Physical

Etching Tools

Lithography - Mask Shop/Design Studio

Lithography - Photo

Lithography - EBL

Lithography - Soft

Other

Printing and Assembly

  • 3D Printer - Prusa I3 MK3S (PLA/ABS/PETG) (FlexFill/Ninjaflex)
  • 3D Printer - Prusa SL1 (tough resin) (flexible resin)
  • NanoAssemblr - Pecision NanoAssemblr Benchtop
  • Screen Printer - MTI EQ-SPC-2-LD
  • Wax Printer - Xerox ColorQube 8570

Packaging 

Processing 

  • *Tube Furnace #1  - MTI OTF-1200X (4")
  • *Tube Furnace #2  - Lindberg Blue M (1")
  • Vacuum Oven #1 - Yield Engineering Systems (YES) 310TA HMDS Vapor-Prime & Image-Reversal Vacuum Oven
  • Vacuum Oven #2 - Thermo Scientific Lindberg Blue M Model No. VO1218A
  • Standard Oven #1 - Thermo Scientific Heratherm OGS60
  • Standard Oven #2 - Yamato Drying Oven DX 300
  • Angstrom Glovebox - Inert PureLab HE
  • Nitrogen Glovebox  - Mbraun Unilab Workstation
  • Rapid Thermal Processor   -  SSI Solaris 150
  • Schlenk Line  - Dual Manifold Vacuum/Argon Line
  • UV Ozone Cleaner  - Jelight M42
  • Process Hood - RCA Clean
  • Process Hood - Liftoff
  • Process Hood - Microfluidics
  • Process Hood - EBL
  • Process Hood -Photoresist
  • Process Hood - Develop
  • Process Hood - HF
  • Process Hood - Acid/Base
  • Process Hood - Miscellaneous
  • Standard vacuum and general purpose ovens

*indicates dual listing