Instrumentation
VINSE provides access and training on start-of-the-art fabrication and characterization equipment inside Vanderbilt University’s Engineering and Science Building (ESB). Full-time staff provide training, process assistance and tool troubleshooting. Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.
Characterization
Imaging Tools
- Atomic Force Microscope - Bruker Dimension Icon
- Dual Beam Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) - FEI Helios NanoLab G3 CX
- Microscope #1 - Nikon Optical Microscope with Digital Image Capture & Transfer Station
- Microscope #2 - Olympus Optical Microscope with Digital Image Capture
- *Optical Stereomicroscope - Motic SMZ 168 TLED, Moticam 5+
- Scanning Electron Microscope - Zeiss Merlin with Gemini II Column
- Transmission Electron Microscope - FEI Tecnai G2 Osiris S/TEM
- Advanced Imaging PC
Imaging Sample Prep
- Sputter Coater - Cressington 108
- Plasma Cleaner - Fischione Model 1020
- Inspection Microscope - Nikon LV100
Spectroscopy
- Confocal Raman Microscope - Thermo Scientific DXR
- Fourier Transform Infrared Spectroscopy (FTIR) with photoelastic modulator - Bruker Tensor 27
- Spectrophotofluorometer - Jobin Yvon Fluorolog-3 FL3-111
- Spectroscopic Ellipsometer - JA Woollam M-2000VI
- Spectrophotometer - Agilent Technologies Cary 5000 UV-VIS-NIR
Metrology
- Quartz Crystal Microbalance w/ Dissipation Monitoring (QCM-D) - Biolin Scientific Qsense E4
- *NanoSight - Malvern Panalytical Nanosight NS300
- Probe Station - Micromanipulator 450PM, Keithley 4200A-SCS
- Solar Testing - Oriel Instruments 100W Xenon Lamp with AM 1.5G filter, Oriel Instruments Cornerstone 130 monochromater, Keithley 2400 SMU
- Stylus Profilometer - KLA Tencor P-7
- Stylus Profilometer - Bruker Dektak 150
- Thermogravimetric Analyzer (TGA) - Instrument Specialists TGA-1000
- Zetasizer - Malvern Panalytical Advance Series Ultra (Red Label)
Fabrication
Deposition - Chemical
- *Tube Furnace #1 - MTI OTF-1200X (4")
- *Tube Furnace #2 - Lindberg Blue M (1")
- Atomic Layer Deposition (ALD) - PicoSun R-200
- Electroplating System - Nickel - Silicon Valley Wafer Plating: The Immersion - Beaker-on-a-Stick System
- PECVD - Trion Orion II
Deposition - Physical
- Multimode Deposition Chamber - Angstrom Amod - Combined e-beam, Resistive & Sputter Deposition Chamber
- Resistive Evaporator #1 - Angstrom Amod - Resistive Chamber
- Sputter Deposition - AJA ATC-2200
Etching Tools
- *Plasma Etch #1 - Trion Phantom II
- *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
- Plasma Etch #3 - Trion Minilock II
- *Plasma Etch #4 - PVA TePla IoN Wave
- *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
- Porous Silicon Etching System - AMMT MPSB 100
Lithography - Mask Shop/Design Studio
- Photoplotter - Bungard Filmstar-PLUS Small
- *Laser Writer - Heidelberg Instruments μPG 101
- Layout Editor Software - Tanner L-Edit
- *Mask Aligner #1 - Karl Suss MA-6
Lithography - Photo
- *Laser Writer - Heidelberg Instruments μPG 101
- *Mask Aligner #1 - Karl Suss MA-6
- Assorted spinners and hot plates
Lithography - EBL
- Electron Beam Lithography System - Raith eLiNE
Lithography - Soft
- *Plasma Etch #1 - Trion Phantom II
- *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
- * Plasma Etch #4 - PVA TePla IoN Wave
- *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
- *Mask Aligner #1 - Karl Suss MA-6
- Microfluidic Flow Control System - Fluigent LineUp Series
- *Optical Stereomicroscope - Motic SMZ 168 TLED, Moticam 5+
- PDMS Aligner - ThorLabs motion control, DinoLite Optics
Other
Printing and Assembly
- 3D Printer - Prusa I3 MK3S (PLA/ABS/PETG) (FlexFill/Ninjaflex)
- 3D Printer - Prusa SL1 (tough resin) (flexible resin)
- NanoAssemblr - Pecision NanoAssemblr Benchtop
- Screen Printer - MTI EQ-SPC-2-LD
- Wax Printer - Xerox ColorQube 8570
Packaging
- Dicing Saw - Disco DAD3220
- Wire Bonder - Westbound Wedge 7476D
Processing
- *Tube Furnace #1 - MTI OTF-1200X (4")
- *Tube Furnace #2 - Lindberg Blue M (1")
- Vacuum Oven #1 - Yield Engineering Systems (YES) 310TA HMDS Vapor-Prime & Image-Reversal Vacuum Oven
- Vacuum Oven #2 - Thermo Scientific Lindberg Blue M Model No. VO1218A
- Standard Oven #1 - Thermo Scientific Heratherm OGS60
- Standard Oven #2 - Yamato Drying Oven DX 300
- Angstrom Glovebox - Inert PureLab HE
- Nitrogen Glovebox - Mbraun Unilab Workstation
- Rapid Thermal Processor - SSI Solaris 150
- Schlenk Line - Dual Manifold Vacuum/Argon Line
- UV Ozone Cleaner - Jelight M42
- Process Hood - RCA Clean
- Process Hood - Liftoff
- Process Hood - Microfluidics
- Process Hood - EBL
- Process Hood -Photoresist
- Process Hood - Develop
- Process Hood - HF
- Process Hood - Acid/Base
- Process Hood - Miscellaneous
- Standard vacuum and general purpose ovens
*indicates dual listing