Instrumentation

VINSE provides access and training on start-of-the-art fabrication and characterization equipment inside Vanderbilt University’s Engineering and Science Building (ESB). Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.

Characterization

Imaging Tools

• Atomic Force Microscope - Bruker Dimension Icon
• Dual Beam Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) - FEI Helios NanoLab G3 CX
• Microscope #1  - Nikon Optical Microscope with Digital Image Capture & Transfer Station
• Microscope #2  - Olympus Optical Microscope with Digital Image Capture
• *Optical Stereomicroscope - Motic SMZ 168 TLED, Moticam 5+
• Scanning Electron Microscope  - Zeiss Merlin with Gemini II Column
• Transmission Electron Microscope  - FEI Tecnai G2 Osiris S/TEM
• Sample Prep

Spectroscopy

• Confocal Raman Microscope - Thermo Scientific DXR
• Fourier Transform Infrared Spectroscopy (FTIR) with photoelastic modulator - Bruker Tensor 27
• Spectrophotofluorometer  - Jobin Yvon Fluorolog-3 FL3-111
• Spectroscopic Ellipsometer  - JA Woollam M-2000VI
• Spectrophotometer - Agilent Technologies Cary 5000 UV-VIS-NIR

Metrology

• Quartz Crystal Microbalance w/ Dissipation Monitoring (QCM-D) - Biolin Scientific Qsense E4
• *NanoSight - Malvern Panalytical Nanosight NS300
• Probe Station - Micromanipulator 450PM, Keithley 4200A-SCS
• Solar Testing - Oriel Instruments 100W Xenon Lamp with AM 1.5G filter, Oriel Instruments Cornerstone 130 monochromater, Keithley 2400 SMU
• Stylus Profilometer - KLA Tencor P-7
• Stylus Profilometer - Bruker Dektak 150
• Thermogravimetric Analyzer (TGA) - Instrument Specialists TGA-1000
• Zetasizer - Malvern Panalytical Advance Series Ultra (Red Label)

Fabrication

Deposition - Chemical

• *Tube Furnace #1  - MTI OTF-1200X (4")
• *Tube Furnace #2 - Lindberg Blue M (1")
• Atomic Layer Deposition (ALD) - PicoSun R-200
• Electroplating System - Nickel - Silicon Valley Wafer Plating: The Immersion - Beaker-on-a-Stick System
• Microwave Plasma CVD - Seki AX5200M
• PECVD - Trion Orion II

Deposition - Physical

• Multimode Deposition Chamber - Angstrom Amod - Combined e-beam, Resistive & Sputter Deposition Chamber
• Resistive Evaporator #1 - Angstrom Amod - Resistive Chamber
• Sputter Deposition - AJA ATC-2200 

Etching Tools

• *Plasma Etch #1 - Trion Phantom II
• *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
• Plasma Etch #3  - Trion Minilock II
• *Plasma Etch #4 - PVA TePla IoN Wave
• *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
• Porous Silicon Etching System - AMMT MPSB 100

Lithography - Mask Shop/Design Studio

• Photoplotter - Bungard Filmstar-PLUS Small
• *Laser Writer - Heidelberg Instruments μPG 101
• Layout Editor Software - Tanner L-Edit
• *Mask Aligner #1 - Karl Suss MA-6

Lithography - Photo

• *Laser Writer - Heidelberg Instruments μPG 101
• *Mask Aligner #1 - Karl Suss MA-6
• Assorted spinners and hot plates

Lithography - EBL

• Electron Beam Lithography System - Raith eLiNE 

Lithography - Soft

• *Plasma Etch #1 - Trion Phantom II
• *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
• * Plasma Etch #4 - PVA TePla IoN Wave
• *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
• *Mask Aligner #1  - Karl Suss MA-6
• Microfluidic Flow Control System - Fluigent LineUp Series
• *Optical Stereomicroscope - Motic SMZ 168 TLED, Moticam 5+
• PDMS Aligner - ThorLabs motion control, DinoLite Optics

Other

Printing and Assembly

• 3D Printer - Prusa I3 MK3S (PLA/ABS/PETG) (FlexFill/Ninjaflex)
• 3D Printer - Prusa SL1 (tough resin) (flexible resin)
• NanoAssemblr - Pecision NanoAssemblr Benchtop
• Screen Printer - MTI EQ-SPC-2-LD
• Wax Printer - Xerox ColorQube 8570

Packaging 

• Dicing Saw - Disco DAD3220
• Wire Bonder - Westbound Wedge 7476D 

Processing 

• *Tube Furnace #1  - MTI OTF-1200X (4")
• *Tube Furnace #2  - Lindberg Blue M (1")
• Vacuum Oven #1 - Yield Engineering Systems (YES) 310TA HMDS Vapor-Prime & Image-Reversal Vacuum Oven
• Vacuum Oven #2 - Thermo Scientific Lindberg Blue M Model No. VO1218A
• Standard Oven #1 - Thermo Scientific Heratherm OGS60
• Standard Oven #2 - Yamato Drying Oven DX 300
• Angstrom Glovebox - Inert PureLab HE
• Nitrogen Glovebox  - Mbraun Unilab Workstation
• Rapid Thermal Processor   -  SSI Solaris 150
• Schlenk Line  - Dual Manifold Vacuum/Argon Line
• UV Ozone Cleaner  - Jelight M42
• Process Hood - RCA Clean
• Process Hood - Liftoff
• Process Hood - Microfluidics
• Process Hood - EBL
• Process Hood -Photoresist
• Process Hood - Develop
• Process Hood - HF
• Process Hood - Acid/Base
• Process Hood - Miscellaneous
• Standard vacuum and general purpose ovens

*indicates dual listing