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Instrumentation

VINSE provides access and training on start-of-the-art fabrication and characterization equipment inside Vanderbilt University’s Engineering and Science Building (ESB). Full-time staff provide training, process assistance and tool troubleshooting.  Our new facilities include a cleanroom, analytical/nanocrystal fabrication support core and advanced imaging suite. The cleanroom provides cutting-edge nanofabrication tools for the development of materials and integrated devices as well as microfluidic and nano-photonic systems. An analytical laboratory conveniently located adjacent to the cleanroom contains a comprehensive range of characterization tools. The imaging suite hosts a number of advanced imaging platforms.

Fabrication

Deposition - Chemical

  • *Tube Furnace #1  - MTI OTF-1200X (4")
  • *Tube Furnace #2 - Lindberg Blue M (1")
  • Atomic Layer Deposition (ALD) - PicoSun R-200
  • Electroplating System - Nickel - Silicon Valley Wafer Plating: The Immersion - Beaker-on-a-Stick System
  • Microwave Plasma CVD - Seki AX5200M
  • PECVD - Trion Orion II

Deposition - Physical

  • Multimode Deposition Chamber - Angstrom Amod - Combined e-beam, Resistive & Sputter Deposition Chamber
  • Resistive Evaporator #1 - Angstrom Amod - Resistive Chamber
  • Resistive Evaporator #2 - Kurt J Lesker Nano 36
  • Sputter Deposition  - AJA ATC-2200 

Etching Tools

  • *Plasma Etch #1 - Trion Phantom II
  • *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
  • Plasma Etch #3  - Trion Minilock II
  • *Plasma Etch #4 - PVA TePla IoN Wave
  • *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
  • Porous Silicon Etching System - AMMT MPSB 100

Lithography - Mask Shop/Design Studio

  • Photoplotter - Bungard Filmstar-PLUS Small
  • *Laser Writer - Heidelberg Instruments μPG 101
  • Layout Editor Software - Tanner L-Edit
  • *Mask Aligner #1 - Karl Suss MA-6

Lithography - Photo

Lithography - EBL

Lithography - Soft

  • *Plasma Etch #1 - Trion Phantom II
  • *Plasma Etch #2 - Oxford PlasmaPro 100 Cobra
  • * Plasma Etch #4 - PVA TePla IoN Wave
  • *Plasma Etch #5 - Harrick Plasma PDC-32G Plasma Cleaner
  • *Mask Aligner #1  - Karl Suss MA-6
  • Microfluidic Flow Control System - Fluigent LineUp Series
  • *Optical Stereomicroscope - Motic SMZ 168 TLED, Moticam 5+
  • PDMS Aligner - ThorLabs motion control, DinoLite Optics

Characterization

Imaging Tools

Spectroscopy

Metrology

Other

Printing and Assembly

  •  3D Printer - Prusa I2 MK3S
  • Inkjet Printer - (coming soon)
  • NanoAssemblr - NanoAssemblr Benchtop
  • Screen Printer - MTI EQ-SPC-2-LD
  • Wax Printer - Xerox ColorQube 8570

Packaging 

  • Dicing Saw - Disco DAD3220
  • Wire Bonder - Westbound Wedge 7476D 

Processing 

  • *Tube Furnace #1  - MTI OTF-1200X (4")
  • *Tube Furnace #2  - Lindberg Blue M (1")
  • Vacuum Oven #1 - Yield Engineering Systems (YES) 310TA HMDS Vapor-Prime & Image-Reversal Vacuum Oven
  • Vacuum Oven #2 - Thermo Scientific Lindberg Blue M Model No. VO1218A
  • Standard Oven #1 - Thermo Scientific Heratherm OGS60
  • Standard Oven #2 - Yamato Drying Oven DX 300
  • Angstrom Glovebox - Inert PureLab HE
  • Nitrogen Glovebox  - Mbraun Unilab Workstation
  • Rapid Thermal Processor   -  SSI Solaris 150
  • Schlenk Line  - Dual Manifold Vacuum/Argon Line
  • UV Ozone Cleaner  - Jelight M42
  • Process Hood - RCA Clean
  • Process Hood - Liftoff
  • Process Hood - Microfluidics
  • Process Hood - EBL
  • Process Hood -Photoresist
  • Process Hood - Develop
  • Process Hood - HF
  • Process Hood - Acid/Base
  • Process Hood - Miscellaneous
  • Standard vacuum and general purpose ovens

*indicates dual listing