KLA Tencor P-7 Profilometer

Overview

Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468

Fee Structure

Get Access - Vanderbilt
Get Access - Non-Vanderbilt

The KLA Tencor P-7 Profilometer is a physical thickness measurement tool that uses a capacitance difference to measure the surface topography and profile of a sample. The stylus is made up of a diamond tip with a 2.5μm diameter that laterally passes across the sample for a given distance. It measures both the step height and the roughness.

Capabilities

• Sample Size
  • Maximum: 8” round
  • Minimum: 10mm x 10mm
• Step Height
  • Maximum: 320μm
  • Minimum: ~15nm
• Vertical data resolution
  • 327μm Range =: 0.2 Å
  • 13μm Range =: 0.008 Å
• Stylus
  • 5μm diameter
  • 60° cone angle
• Applied Force
  • Maximum: 2.00mg
  • Minimum: 0.5mg