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KLA Tencor P-7 Profilometer


Contact: VINSE Cleanroom
ESB 111 - Cleanroom

Fee Structure

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Get Access - Non-Vanderbilt

The KLA Tencor P-7 Profilometer is a physical thickness measurement tool that uses a capacitance difference to measure the surface topography and profile of a sample. The stylus is made up of a diamond tip with a 2.5μm diameter that laterally passes across the sample for a given distance. It measures both the step height and the roughness.


  • Sample Size
    • Maximum: 8” round
    • Minimum: 10mm x 10mm
  • Step Height
    • Maximum: 320μm
    • Minimum: ~15nm
  • Vertical data resolution
    • 327μm Range =: 0.2 Å
    • 13μm Range =: 0.008 Å
  • Stylus
    • 5μm diameter
    • 60° cone angle
  • Applied Force
    • Maximum: 2.00mg
    • Minimum: 0.5mg