Stylus Profilometer - Bruker Dektak 150

Overview

Contact: Dmitry Koktysh
ESB 107 - Analytical
615-343-6757

Fee Structure

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Get Access - Non-Vanderbilt

The Bruker Dektak 150 uses a diamond-tipped stylus to trace surface topography. Surface roughness and step heights can be easily measured, and the stress analysis upgrade allows one to determine wafer stress due to film deposition.

Capabilities

Measurement Technique: contact stylus profilometry
Measurement Capability: two-dimensional surface profile measurements
Sample Viewing 640 x 480-pixel (1/3 in.-format) camera
Stylus Sensor Low-Inertia Sensor (LIS 3)
Stylus Force 1 to 12 mg with LIS 3 sensor
Stylus radius: 12.5 μm
Sample Stage Manual X/Y/, 100 x 100 mm X-Y translation, 360° rotation, manual leveling
Scan Length Range: 55 mm
Data Points Per Scan 120,000 maximum
Sample Thickness Up to 90 mm
Wafer Size: 150 mm
Step Height Repeatability: 6 Å
Vertical Range 524 μm
Vertical Resolution 1 Å max. (at 6.55 μm range)