Plasma Etch #5 - Harrick PDC-32G Plasma Cleaner
Overview
Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468
Fee Structure
Get Access - Vanderbilt
Get Access - Non-Vanderbilt
The Harrick Plasma Cleaner (PDC-32G) can be used for benchtop PDMS roughening and activation for PDMS-PDMS or PDMS-Glass bonding using CDA and O2. This technique is used frequently for microfluidics and soft lithography.
Capabilities
- Gases: CDA, O2
- Quartz chamber and sample carrier
- Adjustable RF power settings - Low, Medium, High
- Active fan cooling
- Overall size: 8.5 inch x 10 inch x 8 inch
- PlasmaFlo gas mixer - quantitative flow control of process gases and chamber vacuum