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Plasma Etch #5 - Harrick PDC-32G Plasma Cleaner


Contact: VINSE Cleanroom
ESB 111 - Cleanroom

Fee Structure

Get Access - Vanderbilt
Get Access - Non-Vanderbilt

The Harrick Plasma Cleaner (PDC-32G) can be used for benchtop PDMS roughening and activation for PDMS-PDMS or PDMS-Glass bonding using CDA and O2.  This technique is used frequently for microfluidics and soft lithography. 


  • Gases: CDA, O2
  • Quartz chamber and sample carrier
  • Adjustable RF power settings - Low, Medium, High
  • Active fan cooling
  • Overall size: 8.5 inch x 10 inch x 8 inch
  • PlasmaFlo gas mixer - quantitative flow control of process gases and chamber vacuum