Tube Furnace #2 - Lindberg Blue M
Overview
Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468
Fee Structure
Get Access - Vanderbilt
Get Access - Non-Vanderbilt
The Lindberg Blue M 1-inch Thermal Furnace is a tool for chemical vapor deposition (CVD), annealing, and oxidation at low pressure or atmospheric pressure and with or without process gases in a 1 inch diameter quartz tube. The tube pressure, temperature, and gas flow rates are tunable.
Capabilites
- Furnace temperature:
- Range: 20 oC to 1100 oC
- Ramp rate controllable
- Heating time: 20 oC to 1050 oC in 22 minutes
- Cooling time: 1050 oC to <150 oC in 45 minutes
- Process gases
- Argon (Ar)
- Nitrogen (N2)
- Oxygen (O2)
- Hydrogen (H2)
- Methane (CH4)
- Ethylene (C2 H4)
- *Capacity for acetylene (C2 H2), discuss with staff
- Furnace pressure
- Range: 18 mTorr to 760 Torr
- Pumpdown rates: 760 Torr to 30 mTorr in 5 minutes, 760 Torr to ~22 mTorr in 40 minutes
- Maximum sample size: 85 inches (2.15cm) - inner diameter of tube
- Sample holders
- Quartz boats with magnetic handles (9 cm x 1.6 cm x 1 cm) for graphene growth and wet oxidation
- Quartz boats (9.5 cm x 1.2 cm x 1.1 cm) for dry oxidation and polymer pyrolysis
- Alumina boats (4.7 cm x 0.8 cm x 1 cm, 4.6 cm x 1.6 cm x 2cm, 9.4 cm x 1.3 cm x 2.0 cm) for precursor materials and delicate samples
- Alternate exhausts
- Liquid nitrogen cold trap
- Oxygen+argon bubbler exhaust
- Sublimation side chamber available (20 oC to 600 oC)