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Rapid Thermal Processor (RPT)

SSI Solaris 150

Description:

The Solaris 150 (Surface Science Integration, Inc.) is a manual loading RTP system for R&D and pre-production. The Solaris 150 can process up to 152.4mm (6") substrates at a temperature range from Room Temp - 1300 0C. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emissivity differences. The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity.

Current process gases are:
  • Ar
  • N2