Rapid Thermal Processor (RPT)
SSI Solaris 150
Description:
The Solaris 150 (Surface Science Integration, Inc.) is a manual loading RTP system for R&D and pre-production. The Solaris 150 can process up to 152.4mm (6") substrates at a temperature range from Room Temp - 1300 0C. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emissivity differences. The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity.Current process gases are:
- Ar
- N2