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Microwave Plasma CVD

CVD Seki AX5200M

Description:

  • 2.45 GHz micro-wave source 1.5 kW
  • 5 kW water cooled induction heater stage (750 C)
  • Chamber pressure control (1-400 torr)
  • CH4, H2, N2, O2 available with MFC
  • DC bias on substrate holder up to 200 V
  • Applications: nanocrystalline Diamond, microcrystalline diamond