KLA Tencor P-7 Profilometer
Overview
Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468
Fee Structure
Get Access - Vanderbilt
Get Access - Non-Vanderbilt
The KLA Tencor P-7 Profilometer is a physical thickness measurement tool that uses a capacitance difference to measure the surface topography and profile of a sample. The stylus is made up of a diamond tip with a 2.5μm diameter that laterally passes across the sample for a given distance. It measures both the step height and the roughness.
Capabilities
- Sample Size
- Maximum: 8” round
- Minimum: 10mm x 10mm
- Step Height
- Maximum: 320μm
- Minimum: ~15nm
- Vertical data resolution
- 327μm Range =: 0.2 Å
- 13μm Range =: 0.008 Å
- Stylus
- 5μm diameter
- 60° cone angle
- Applied Force
- Maximum: 2.00mg
- Minimum: 0.5mg