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ANALYTICAL LAB SAFETY PLAN & CODE OF OPERATIONS MANUAL

CLEANROOM SAFETY PLAN & CONDUCT OF OPERATIONS MANUAL

INSTRUCTIONS FOR CLEANROOM TOOL TRAINING

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VINSE Cleanroom Safety Orientation

VINSE Analytical Laboratory Orientation

VINSE: Introduction to Device Fabrication

VINSE: Introduction to Etching

VINSE: Introduction to Deposition

VINSE: Introduction to Photolithography

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Safety Data Sheets

Chemical NameAdvanced Imaging /
Specimen Prep		AnalyticalCleanroom
1_1-Azobis_cyclohexanecarbonitrile✓
1,2-Dichlorobenzene✓
1,2-Dichloroethane ✓✓
1,3,5-Triallyl-1,3,5-triazine-2,4,6(1H,3H,5H) - trione✓
1,8-Diaminooctane✓
1,10-Phenanthroline✓
1,4-Phenylene diisocyanate (PDITC)✓
1,8-Diiodooctane✓
1-Dodecanethiol (DDT)✓
1-Hexanol✓
1-Methyl-2-pyrrolidinone (NMP)✓
1-Thioglycerol✓
102-03✓
113-12✓
125-21✓
129-41✓
2,2'-Bipyridyl; 2,2'-Bipyridine✓
2,2′-Dithiobis(benzothiazole)✓
2,2′-(Ethylenedioxy)bis(ethylamine)✓
2-(Dimethylamino)ethanethiol hydrochloride✓
2-Hydroxy-2-methylpropiophenone✓
2-Mercaptoethanol✓
2-Propanol/ Isopropanol (IPA)✓✓
3,3′,5,5′-Tetramethylbenzidine✓
(3-Aminopropyl)trimethoxysilane✓✓
(3-Glycidyloxypropyl) trimethoxysilane (GLYMO)✓
3-Mercaptopropionic acid✓✓
(3-Mercaptopropyl) trimethoxysilane (MPTMS)✓
3-(Trichlorosilyl)propyl methacrylate✓
4,4′-Bis(N-carbazolyl)-1,1′-biphenyl✓
4-(Dimethylamino)pyridine✓
4-Mercaptobenzoic acid✓
4-Nitrobenzaldehyde✓
5-Amino-1-pentanol✓
11-Mercaptoundecanoic acid✓
A Thinner✓
Acetic acid✓
Acetone✓✓✓
Acetonitrile✓
Acetylene (C2H2)✓
Acrylamide✓
Alcatel 119 Oil✓
Alconox detergent✓
Aldehyde Methoxysilane✓
Aluminum (Al)✓✓
Aluminum etchant type A✓
Aluminum oxide (Al2O3)✓
Aluminum powder✓
Aluminum zinc oxide (AZO)✓
Ammonia (NH3)✓
Ammonium hydroxide (NH4OH)✓
Ammonium persulfate✓
Amyloid beta(1-42)✓
Anisole✓
Aqua Regia✓
Argon (Ar)✓✓✓
AZ 300 MIF developer✓
AZ 400T Photoresist Stripper✓
AZ 1500 Series Photoresist✓
AZ 5214e photoresist✓
AZ 400K Developer✓
b-Alanine✓
Benzoyl peroxide✓
Benzyl ether✓
Benzyldimethylhexadecylammonium chloride✓
Bis(hexamethylene)triamine✓
Bisacrylamide✓
Bismuth Tin eutectic✓
Bisphenol A ethoxylate dimethacrylate✓
Bleach✓
Borane ammonia complex (BH3-NH3)✓
Boric acid✓
Boron trichloride (BCl3)✓
Buffer HF improved✓
Buffer solution pH 4.01✓
Buffer solution pH 7.0✓
Buffer solution pH 10.0✓
Cadmium acetate hydrate✓
Cadmium chloride hydrate✓
Cadmium oxide (CdO)✓
Cadmium sulfide (CdS)✓
Cadmium telluride (CdTe)✓
Calcium oxalate monohydrate✓
Calcium sulfate✓
Carbon dioxide (CO2)✓
Cavicide (019 ESB)✓✓✓
Cesium iodide (CsI)✓
Cetyltrimethylammonium chloride✓
Chitosan✓
Chlorine (Cl2)✓
Chlorobenzene✓
Chloroform✓✓
Chromium (Cr)✓
Chromium etchant 1020✓
Chromium mask etchant✓
Citric acid✓✓
CLR Pro✓
CMP TW 2 pump fluid✓
Cobalt (Co)✓
Compressed air (CDA)✓✓
Copper (Cu)✓
Copper etchant 49-1✓
Copper etchant 44583✓
Copper(I) iodide✓
Copper(II) acetate✓
Copper II sulfate pentahydrate✓
Copper Sulfide✓
Cyclohexane✓
Cyclopentanone✓
Cysteamine hydrochloride✓
D-(+)- glucose solution✓
DEAE-Dextran hydrochloride✓
Decane✓
Decanoic acid✓
Dextran sulfate sodium salt✓
Dibutyl phthalate✓
Dicumyl peroxide✓
Diethyl ether✓
Diethylzinc✓
Diethyldithiocarbamic acid diethylammonium salt✓
Dimethyl sulfoxide (DMSO)✓
Dioctyl ether✓
Dioctylamine✓
Diphenyl(2,4,6-trimethylbenzoyl)phosphine oxide✓
Diphenyl ether✓
DisCharge H2O✓
DL-Lysine✓
Dodecylamine✓
Dow Corning (R) XR-1541-006 e-beam resist in MIBK✓
Dow Corning 340 Heat sink compound✓
Dow Corning High vacuum grease✓
Drierite✓
EBR 10A edge bead remover✓
EBR PG edge bead remover✓
Ecotex AP-blue emulsion✓
Ecotex degreaser concentrate✓
Ecotex emulsion remover✓
Edwards Ultragrade-10 oil✓
Epo-tek 301-2 part A & B✓
Epon 826 Resin✓
Ethanol✓✓✓
Ethyl acetate✓✓
Ethyl cellulose✓
Ethylene (C2H4)✓
Ethylene glycol dimethacrylate✓
Ethylene glycol✓
Ethylenediamine✓
Europium(III) chloride✓
EZ-link NHS-biotin✓
EZ-link NHS-LC-LC-biotin✓
Ferric chloride / Iron trichloride (FeCl3)✓
Fluoresceine isothiocyanate✓
Fluoresceineamine✓
Fluorine (F2)✓
Folic acid✓
Fomblin YL Vac✓
Germanium antimony telluride (GST)✓
Germanium (Ge)✓
Glucose oxidase✓
Glutaraldehyde solution✓
Glycine✓
Gold (Au)✓✓
Gold etchant✓
Gold (III) chloride hydrate✓
Graphite flakes✓
Hafnium oxide (HfO2)✓
Helium (He)✓
HEPES✓
Hexadecylamine✓
Hexadecyltrimethylammonium bromide✓
Hexadecyltrimethylammonium chloride✓
Hexamethyldisilathiane; Bis(trimethylsilyl) sulfide✓✓
Hexamethyldisilazane (HMDS)✓✓
Hexane✓
Hexyl alcohol✓
Horseradish peroxidase✓
Hydrochloric acid (HCl)✓
Hydrofluoric acid (HF)✓
Hydrogen 5% in nitrogen (H2-N2)✓✓
Hydrogen (H2)✓
Hydrogen in non-flammable mixture (H2)✓
Hydrogen peroxide (H2O2)✓
Hydrogen silsesquioxane (HSQ)✓
Hydroxylamine hydrochloride✓
Hydroxypropyl cellulose✓
IGEPAL C0-520✓
IGEPAL CA-630✓
Indium(III) acetate✓
Indium (In)✓
Indium tin oxide (ITO)✓
Indocyanine green✓
Iridum✓
Iron (Fe)✓
Iron(II) chloride✓
Iron(III) acetylacetonate✓
Iron(III) chloride✓
Iron(III) nitrate nonahydrate✓
Iron(III) oxide✓
Isopropanol✓
IVP 19 oil✓
Jeffamine D-230✓
KMSF 1000✓
KMSF 2000 Series Resists✓
Kodak Rapid Developer✓
Kodak Rapid FixerAB✓
Kraton G Polymers (SEBS and SEBS OE)✓
L-Aspartic acid✓
L-Ascorbic acid✓
L-cysteine✓
L-Glutathione reduced✓
Lanthanum Vanadium Oxide (pieces)✓
Latex spheres✓
Lauryl methacrylate✓
Lead(II) 2-ethylhexanoate✓
Lead(II) acetate trihydrate✓
Lead(II) chloride✓
Lead(II) sulfide✓
Lead oxide✓
Lithium fluoride (LiF)✓
Lithium lanthanum zirconium oxide powder (Al-doped LLZO)✓
Lithium niobate✓
Lithium oxide (Li2O)✓
Loctite Super Glue✓
LOR A series lift off resist✓
LOR B series lift off resist✓
Luviskol Plus✓
M-bond 610 adhesive✓
ma-D-525 developer✓
ma-N 2400 series negative photoresist✓
Magnesium (Mg)✓
Magnesium oxide (MgO)✓
Magnesium sulfate✓
Manganese(II) acetate tetrahydrate✓
Manganese(II) chloride✓
Megaposit MF 26A developer✓
Megaposit SPR 220-4.5 positive photoresist✓
Megaposit SPR 220-7.0 positive photoresist✓
Mercaptosuccinic acid✓
MES hydrate✓
Metalon HPR-059 Carbon Screen Ink✓
Methane (CH4)✓
Methanol✓✓✓
Methiopropamine✓
Methyl sulfoxide✓
Methyl isobutyl ketone / 4-Methylpentan-2-one (MIBK)✓✓
Metter Toledo Buffer Solution pH 10.00✓
Metter Toledo Buffer Solution pH 4.01✓
Metter Toledo Buffer Solution pH 7.00✓
Micro 90 concentrated cleaning solution✓
Microposit developer concentrate✓
Microposit MF CD-26✓
Microposit MF-319 developer✓
Microposit remover 1165✓
Microposit S1805 positive photoresist✓
Microposit S1813 positive photoresist✓
Mineral oil✓✓
Mobil DTE 24✓
Molecular sieve✓
Molybdenum etchant TFM✓
Molybdenum (Mo)✓
Molybdenum trioxide (MoO3)✓
mr-Conductive layer✓
mr-DWL series photoresist✓
mr-T 1090 thinner✓
Myristic acid✓
N,N-Dimethylformamide✓
N,N-Dimethylformamide (DMF)✓
N-(2-Mercaptopropionyl)glycine✓
N-(3-Dimethylaminopropyl)-N′-ethylcarbodiimide hydrochloride✓✓
N-Acetyl-L-cysteine✓
N-Acetyl-L-proline✓
n-Dodecylphosphonic acid✓
N-Ethyldiisopropylamine✓
N-Hydroxysuccinimide✓
N-Hydroxysulfosuccinimide sodium salt✓✓
Negative resist NR9-1000PY✓
Neodymium acetate✓
Neopentyl glycol diglycidyl ether✓
Nickel chloride (NiCl2)✓
Nickel etchant for electrodeposited nickel films✓
Nickel etchant TFB✓
Nickel (Ni)✓
Nickel sulfate hexahydrate✓
Niobium (Nb)✓
Nitric acid (HNO3)✓✓
Nitrogen (N2)✓✓✓
Nitrogen, refrigerated liquid (LN2)✓✓
Nitrous oxide (N2O)✓
Nonanoic acid✓
Norland optical adhesive 60✓
Norland optical adhesive 61✓
Norland optical adhesive 63✓
Norland optical adhesive 65✓
Norland optical adhesive 68✓
Norland optical adhesive 81✓
Octadecane✓
Octadecylamine✓
Octafluorocyclobutane / Perfluorocyclobutane (C4F8)✓
Octane✓✓
Octylamine✓
Oleic acid✓
Oleylamine✓
Optishield corrosion inhibitor✓
Orton Pyrometric Cones and Bars
✓
Ossila Pc70bm✓
Ossila PCE10✓
Ossila PEDOT-PSS-ph-1000✓
Ossila PV-OLED-encapsulation-epoxy✓
Oxygen (O2)✓
Poly(3-hexylthiophene-2,5-diyl)✓
Parylene Dimer DPX-C✓
PbS core Evidots in toluene✓
PCS 605 photomask cleaning solution✓
PEDOT-PSS✓
Pentaerythritol tetrakis (3-mercaptopropionate)✓
Perchloric acid✓
Pfeiffer Vacuum F3 Pump Oil✓
pH indicator solution pH 4.0-10.0✓
Phosphate buffered saline✓✓
Phosphine 1% in helium or nitrogen (PH3-H2/N2)✓
Phosphine in helium (PH3-He)✓
Phosphor P-22 blue✓
Phosphosilicate Solution (P509)✓
Phosphotungstic acid hydrate✓
Piranha sulfuric acid peroxide✓
Platinum (Pt)✓
PLL-g-PEG✓
Poly(3-hexylthiophene-2,5-diyl)✓
Poly(allylamine) solution✓
Poly(diallyldimethylammonium chloride) solution✓✓
Poly(ethylene glycol) dimethacrylate✓
Poly(isobutylene-alt-maleic anhydride)✓
Poly(sodium 4-styrenesulfonate)✓
Poly(vinylidene fluoride)✓
Poly-D-lysine hydrobromide✓
Poly-L-lysine hydrobromide✓
Poly(propylene carbonate)✓
Polyacrylic acid✓
Polyboron solution B155✓
Polyclean Clarifier✓
Polyethylene glycol 400✓
Polyethylene glycol methyl ether✓
Polyethylene glycol (PEG)✓✓
Polyethylenimine✓
Polyimide PI2574✓
Polyimide PI2611✓
Polylactic acid (PLA)✓
Polymethyl methacrylate in anisole (950 PMMA A Series)✓
Polymethyl methacrylate (PMMA)✓
Polymethylglutarimide (PMGI)✓
Polypropylene glycol acrylate✓
Polystyrene beads✓
Polystyrene-b-poly(dimethylsiloxane), diblock copolymer✓
Polyvinyl alcohol (PVA)✓
Polyvinylpyrrolidone✓
Potassium chloride✓✓
Potassium hydroxide (KOH)✓✓
Potassium iodide✓
Potassium niobate✓
Potassium tantalate✓
Potassium tert-butoxide✓
Protective Resist Layer Version 041✓
PRS 100 positive resist stripper✓
Pyridine✓✓
Quinine sulfate dihydrate✓
Reagent alcohol✓
Red Cabbage Jiffy Juice✓
Remover PG✓
Resist developer RD6✓
Resist remover RR41✓
Rhodamine 6G✓
(S)-1-Acetylpyrrolidine-2-carboxamide✓
Scandium (Sc)✓
Silane in helium (SiH4-He)✓
Silica✓
Silicon dioxide (SiO2)✓
Silicon (IV) chloride (SiCl4)✓
Silicon monoxide (SiO)✓
Silicon nitride (Si3N4)✓
Silicon (Si)✓
Silicone oil✓
Silver (Ag)✓
Silver diethyldithiocarbamate✓
Silver nitrate✓
Silver powder✓
Silver sulfide✓
Sodium bicarbonate✓
Sodium borohydride✓
Sodium Carbonate✓
Sodium chloride (NaCl)✓✓
Sodium citrate dihydrate✓✓
Sodium diethyldithiocarbamate trihydrate✓
Sodium dodecyl sulfate✓
Sodium hydroxide✓✓
Sodium (meta)periodate✓
Sodium n-dodecyl sulfate✓
Sodium oleate✓
Sodium phosphate monobasic dihydrate✓
Sodium saccharin✓
Sodium salicylate✓
Sodium sulfide✓
Sodium sulfite✓✓
Sodium telluride✓
Sodium tellurite✓
Sodium tetraborate decahydrate✓
Sodium thiosulfate pentahydrate✓
Sodium triethylborohydride✓
Solid Ink✓
Span 80✓
Speedball Acrylic Screen Printing Ink✓
Squalene✓
Stearic acid✓
Streptavidin✓
SU-8 2000 developer✓
SU-8 2000 series resist✓
SU-8 3000 SeriesResists-EU✓
SU-8 3000 series resist✓
SU-8 XFT Series Resists-GB✓
SU-8 XFT series resist✓
Sulfosuccinimidyl 6-(4'-azido-2'-Nitrophenylamino)hexanoate (Sulfo SANPAH)✓
Sulfur hexafluoride (SF6)✓✓
Sulfur (S)✓
Sulfuric acid (H2SO4)✓✓
SYLGARD 184 Silicone Elastomer Base✓
SYLGARD 184 Silicone Elastomer Curing Agent✓
Tantalum (Ta)✓
Tellurium (Te)✓
TEMPO✓
Terpineol✓
Tetrabutylammonium fluoride trihydrate✓
Tetrabutylphosphonium bromide✓
Tetrachloroethylene✓
Tetradecylphosphonic acid✓
Tetraethyl orthosilicate✓✓
Tetraethylthiuram disulfide✓
Tetrafluoromethane / Carbon tetrafluoride (CF4)✓
Tetrahydrofuran (THF)✓
Tetrakis(dimethylamino)titanium (TDMAT)✓
Tetramethylammonium hydroxide✓
Tetramethylethylenediamine (TEMED)✓
Tetrapropylammonium hydroxide✓
Thiazolyl blue tetrazolium bromide✓
Thioacetamide✓
Thioctic acid✓
Thiourea✓
Titanium(IV) chloride, (99.99+%-Ti) PURATREM✓
Tin(II) acetate✓
Tin(II) chloride✓
Tin(II) oxide✓
Tin(II) sulfide✓
Tin(IV) chloride pentahydrate✓
Tin oxide (SnO)✓
Tin (Sn)✓
Titanium (IV) isopropoxide✓
Titanium (IV) oxide powder✓
Titanium oxide (TiO2)✓
Titanium tetrachloride (TiCl4)✓
Titanium (Ti)✓
TKO-19 vacuum pump fluid✓
TMAH 25% (Tetramethylammonium hydroxide)✓
Toluene✓✓
Tri-n-octylphosphine oxide (TOPO)✓
Trichloro perfluorooctyl silane✓
Triethoxy(octyl)silane✓
Trifluoromethane (CHF3)✓
Trimethylaluminum (TMA)✓
Trimethylboron (B[CH3]3)✓
Trimethylboron in hydrogen or nitrogen (B[CH3]3-H2/N2)✓
Tris buffer✓
Triton X-100✓✓
Tungsten (W)✓
UniLOR N Series Resists✓
Vanadium (III) Chloride✓
Vanadium oxide (V2O5)✓
Vanadium (V)✓
VM651✓
Xenon Difluoride XeF2✓
Yttrium oxide (Y203)✓
ZDMAC✓
ZEP 520A✓
Zinc acetate✓
Zinc diethyldithiocarbamate✓
Zinc oxide (ZnO)✓
Zinc metal powder✓
Zinc stearate✓
Zinc chloride✓