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VINSE Cleanroom

  • SEM image of a Distributed Bragg Reflector cross-section ready for deposition.

    Precision Fabrication of 2D Materials with the VINSE Helios FIB-SEM

    2D materials are a relatively new class of materials that can exhibit unique behavior because of their finite thickness. Classic processing approaches, like the Scotch™ tape method, take advantage of the weak Van der Waals forces between the layers, enabling the separation and deposition of 2D sheets onto a variety… Read More

    October 15, 2026

  • Figures compare liftoff processes on indium tin oxide (ITO) on silicon, with feature sizes ranging from 5 to 20 µm in diameter.

    New Negative-Tone Photoresist for VINSE Cleanroom Fabrication

    The VINSE cleanroom has expanded its photoresist catalog for micro/nanofabrication.  Over the summer, VINSE Tech Crew member Elsa Fong helped develop operating parameters for UniLOR N, a negative-tone resist for single-layer liftoff processes, complementing the positive-tone resists already in use, such as LOR.  UniLOR N will replace NR9 in the… Read More

    October 14, 2026

  • Vanderbilt Institute for Nanoscale Science and Engineering's BioBay.

    VINSE Cleanroom Renovations Support Groundbreaking Ancient DNA Research

    Ancient DNA research is coming to VINSE! The BioBay in the VINSE cleanroom is being renovated to enable DNA extraction from ancient remains in a controlled environment that minimizes the chance for contamination from modern DNA. Studying ancient DNA can provide important insights into how diseases such as osteoporosis, influenza,… Read More

    August 11, 2026

  • Elionix ELS-BODEN 50 electron beam lithography (EBL) system to the VINSE cleanroom

    VINSE Adds New High-Speed Electron Beam Lithography System

    Silicon Metasurface Filter Arrays VINSE is excited to announce that the Elionix ELS-BODEN 50 electron beam lithography (EBL) system is now available to users in the cleanroom. The new tool brings a major boost in both resolution and throughput, enabling fabrication of features as… Read More

    June 25, 2026

  • Data graph showing Fibronectin QCM-D data of absorption, viscoelastic modeling and quantification of mass, thickness and viscoelastic properties of the adsorbed layer.

    VINSE Upgrades Quartz Crystal Microbalance with Dissipation Monitoring (QCM-D)

    Collected QCM-D data of fibronectin absorption can be used for viscoelastic modelling and quantification of mass, thickness and viscoelastic properties of the adsorbed layer. With the completed upgrades to VINSE’s Biolin Scientific QCM-D analytical software package, DFind, users can now access a comprehensive toolkit designed for real-time analysis of surface-interaction… Read More

    April 1, 2026

  • KLayout software example

    VINSE Transitions from L-Edit to KLayout for Cleanroom CAD

    VINSE offers customized photolithography patterning for direct-write or photomask applications. Tanner [Siemens] L-Edit IC software is a CAD package capable of complex, multi-layer layout editing for cleanroom tools such as the Bungard photoplotter, Heidelberg uPG101 laser writer, Raith eLine electron beam lithography system [EBL], and the future Elionix ELS-BODEN 50… Read More

    February 22, 2026

  • Ion Wave 10 equipment

    Ion Wave 10 Returns to the VINSE Cleanroom

    VINSE is pleased to announce that the Ion Wave 10 Batch Plasma System has been successfully repaired and returned to service in the VINSE cleanroom. The Ion Wave 10 is a microwave plasma processing system that delivers higher ion and radical densities at lower substrate bias voltages than traditional RF… Read More

    February 12, 2026

  • Vanderbilt University

    Seeding Success Award Supports New Laser Writer for VINSE

    VINSE has received a Seeding Success award to support the acquisition of a new Heidelberg µMLA Laser Writer for the VINSE cleanroom. The proposal was led by Matthew Day, Assistant Professor of Physics and Astronomy and Electrical and Computer Engineering, who serves as principal investigator. The new… Read More

    December 16, 2025

  • Vanderbilt University

    From Concept to Pitch: Vanderbilt’s Nanoscale Innovation Course Drives Student Innovation

    The Nanoscale Innovation and Making course challenged Vanderbilt students to solve large problems using nanoscience. Students from majors such as computer science, engineering, and economics participated, resulting in a diverse array of product prototype ideas. Students in this hands-on course applied nanotechnology, entrepreneurship, and business strategy in both the classroom… Read More

    December 15, 2025

  • Vanderbilt University

    New Ancient DNA Laboratory Coming to VINSE Cleanroom to Explore Health over Time

    Vanderbilt Institute for Nanoscale Science and Engineering (VINSE) is thrilled to announce an exciting new addition to its Cleanroom: a state-of-the-art laboratory dedicated to studying ancient DNA. In late 2025, a team of researchers, led by Dr. James Crowe, Director of the Vanderbilt Vaccine Center, and Dr. Katherine Van… Read More

    December 24, 2024