AJA Sputter Deposition
Sputter Deposition AJA ATC 2200
The ATC 2200 (AJA International, Inc.) is a versatile load-locked sputter coating system. There are 4 available sputter guns which can be configured for either DC or RF magnetron sputtering. Samples may also be heated to 800 0C and rotated for increased uniformity. Current sputter targets are Si (undoped), SiO2, and Si3N4. Available gases are Ar, O2, and N2.