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Scanning Electron Microscope (SEM) - Merlin

SEM Zeiss Merlin


MERLIN SEM with the GEMINI II column combines ultra fast analytics, high resolution imaging using advanced detection modes, and future assured configuration flexibility on one single system.

• Field-emission Source
• Gemini II Electron Column
• Probe currents (10 pA-40nA)
• Operation voltage: 500V-20 kV
• 0.8 nm resolution at 20 kV
• 1.6 nm resolution at 1 kV
• Emitter: Schottky Type
• InLens, HE-SE2, EsB, BSD Detectors
• Chamber Scope
• Oxford X-Max 50 SDD EDS detection and mapping
• Local charge compensation via gas injection
• Segmented STEM Detector and TEM grid holder
• Airlock for quick sample exchange