Scanning Electron Microscope (SEM) - Merlin

SEM Zeiss Merlin

Description:

MERLIN SEM with the GEMINI II column combines ultra fast analytics, high resolution imaging using advanced detection modes, and future assured configuration flexibility on one single system.

CAPABILITIES
• Field-emission Source
• Gemini II Electron Column
• Probe currents (10 pA-40nA)
• Operation voltage: 500V-20 kV
• 0.8 nm resolution at 20 kV
• 1.6 nm resolution at 1 kV
• Emitter: Schottky Type
• InLens, HE-SE2, EsB, BSD Detectors
• Chamber Scope
• Oxford X-Max 50 SDD EDS detection and mapping
• Local charge compensation via gas injection
• Segmented STEM Detector and TEM grid holder
• Airlock for quick sample exchange