Microwave Plasma CVD - Seki AX5200M

Overview

Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468

Fee Structure

Get Access - Vanderbilt
Get Access - Non-Vanderbilt

Deposition tool for synthesizing high quality poly crystalline and single crystal diamond films.

Capabilities

• 2.45 GHz micro-wave source 1.5 kW
• 5 kW water cooled induction heater stage (750 C)
• Chamber pressure control (1-400 torr)
• CH₄, H₂, N₂, O₂ available with MFC
• DC bias on substrate holder up to 200 V
• Applications: nanocrystalline Diamond, microcrystalline diamond