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VINSE - Vanderbilt Institute of Nanoscale Science and Engineering

VINSE - Vanderbilt Institute of Nanoscale Science and Engineering
  2. Facilities
  3. Advanced Imaging Capabilities

Advanced Imaging Capabilities

The VINSE Advanced Imaging suite holds four imaging bays to host our modern electron, ion and scanning probe instrumentation for the characterization of nanomaterials and devices. 

Bruker Dimension Icon AFM   |   Helios Nanolab G3 CX Dual Beam FIB  |  Tecnai Osiris TEM/STEM  |  Zeiss Merlin SEM

Bruker Dimension Icon AFM

  • X-Y scan range: 90μm x 90μm typical
  • Z range: 10μm typical in imaging and force curve modes
  • Sample size/holder: 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
  • Vertical noise floor: <30pm
  • X-Y position noise: <0.15nm
  • Motorized position stage (X-Y axis): 180mm × 150mm inspectable area
  • Microscope optics: 5-megapixel digital camera;
  • Digital zoom and motorized focus
  • Controller NanoScope V
  • Vibration isolation: Integrated, pneumatic
  • Acoustic isolation

AFM Modes

  • Contact Mode
  • TappingMode
  • PhaseImaging
  • ScanAsyst/PeakForce mode
  • PeakForce QNM
  • Force Spectroscopy/Force Curves
  • Force Volume
  • Piezo Response Force Microscopy
  • Lateral Force Microscopy (LFM)
  • Magnetic Force Microscopy (MFM)
  • Electric Force Microscopy (EFM)
  • Kelvin Probe Force Microscopy (KPFM-AM)/Surface Potential
  • Scanning Tunneling Microscopy (STM)
  • Torsional Resonance Mode (TRmode)
  • Scanning Thermal Microscopy (SThM)
  • Cantilever Holder for Scanning in Fluid
  • Fluid and Gas Flow Cell with 60 °C heater

Learn more about the Buker Dimension Icon AFM

Helios Nanolab G3 CX Dual Beam FIB

Imaging

  • High Resolution SEM Optimized for Low Voltage
  • In-Lens Secondary and Backscattered Electron Detector
  • Everhart-Thornley Secondary Electron Detector
  • Advanced Backscattered Electron Detection (Concentric Backscatter Detector)
  • Segmented STEM3 Scanning Transmission Detector
  • ICE Secondary Ion and Electron Detector

Spectroscopy

  • Energy Dispersive Spectroscopy (Bruker X-max 50 SDD)

Milling and Patterning

  • Focused Ion Beam Milling and Patterning (4 nm with 30 kV Ga ions)
  • Pt E-beam and I-beam Deposition
  • GDSII Compatible Nanobuilder Software

TEM Sample Preparation

  • TEM Lift-Out Lamella Preparation (Easylift EX and AutoTEM4 Software)

Volume FIB-SEM Imaging

  • Automated Large Volume Imaging (Auto Slice and View 4)
  • Volume Alignment and Segmentation with Amira Software

Cryo-SEM and Cryo-FIB-SEM

  • Quorum PP3010T Cryo Preparation System
  • Automated Cryo-ET Sample Preparation (SerialFIB)

Build Your Own Automation

  • Advanced Scripting for Python-based Automation

Learn more about the Helios Nanolab G3 CX Dual Beam FIB

Tecnai Osiris TEM/STEM

Imaging

  • Conventional Bright-Field and Dark-Field TEM imaging at 60 kV to 200 kV
  • High Resolution TEM with better than 0.2 nm resolution
  • High Resolution HAADF (Z-contrast) STEM with 0.16 nm resolution
  • Electron Diffraction via Selective Area Electron Diffraction or Convergent Beam Electron Diffraction
  • 3D imaging of nanostructure morphology with TEM and STEM tomography
  • Automated through focal series collection and exit wave reconstruction with TrueImage

Spectroscopy - SuperX™ Empowered Energy Dispersive Spectroscopy

  • TEM-EDS for element detection down to and including boron
  • STEM-EDS chemical mapping with sub-nm spatial resolution
  • Rapid chemical imaging with quantifiable results
  • STEM-EDS in 3D with tilt-insensitive detector positions

In-Situ Heating

  • Protochips Aduro Platform – room temperature to 1200 ˚C
  • Gatan in situ Heating Holder – tantalum crucible for conventional TEM samples, up to 1300 ˚C

Software

  • Amira 3D visualization software
  • Inspect3D tomography reconstruction software
  • Trueimage exit wave reconstruction software
  • Bruker Esprit 1.9 EDS analysis software

Learn more about the Tecnai Osiris TEM/STEM

Zeiss Merlin SEM

Imaging

  • High resolution SEM for 1 kV up to 30 kV
  • Everhart-Thornley secondary electron detector
  • In-lens secondary and energy selective backscatter detector
  • Segmented STEM detector and dedicated TEM grid holder
  • 4-Quadrant backscattered electron detector

Spectroscopy

  • Energy Dispersive Spectroscopy (Oxford X-MAX 50 SDD)

Charge Compensation

  • Gas injection needle for charge compensation for improved imaging of non-conductive samples

Software

  • Oxford Aztec 3.3 EDS Analysis Software

Learn more about the Zeiss Merlin SEM