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Facilities:

Electron Optics Laboratory
Lab Director: Professor James E. Wittig 615-343-6028
Lab Contact: Dr. Anthony B.Hmelo anthony.b.hmelo@vanderbilt.edu or 615-343-7212, 6522 Stevenson Center

The VINSE Electron Optics center, located in SC 5602,  is a multi-user facility for materials characterization using electron microscopy. The central instrument is a Hitachi S4200 high resolution scanning electron microscope (SEM) equipped with a cold field emission electron gun, digital imaging, and a thin-window energy dispersive x-ray spectrometer (EDS). Higher resolution is available using the Philips CM20 transmission electron microscope (TEM) with a scanning transmission (STEM) attachment and EDS detector. Support equipment includes a digital image processing lab and complete sample preparation capability for metals, semiconductors, ceramics, and polymers.

Instruments

EBL - Electron Beam Lithography ToolEBL - Pattern EditorEBL - Spin Coater
EBL - Electron Beam Lithography ToolPhoto not availableEBL - Spin Coater

The Raith eLiNE is an SEM style instrument for fabricating high resolution nano-patterened devices by exposing and processing electron-sensitive resists.This tool is now operational. We welcome users interested in both state of the art SEM imaging and metrology, as well as nanofabrication. Please visit the Raith User Group Pages for more information.



The VINSE spin coater facility supports  user training and the demonstration of the Raith eLiNE EBL. It is available for spinning and processing PMMA resists ONLY!


SEM - Scanning Electron MicroscopeSPM - Scanning Probe MicroscopeTEM - Transmission Electron Microscope
SEM - Scanning Electron MicroscopeSPM - Scanning Probe MicroscopeTEM - Transmission Electron Microscope

SEM WEBSITE


JEOL 5200 SPM


TEM WEBSITE
 
Vanderbilt University