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Nano-Carbon Laboratory
Lab Director: Professor J.L. Davidson (615) 343-7886
Lab Contact: Dr. Bo Choi bo.choi@vanderbilt.edu or (615) 343-6720, 6217 C Stevenson Center Carbon-compound nanostructure synthesis, design, and fabrication of nanoelectronic devices for power and speed applications. Instruments | Angstrom eBeam and Sputter Tool |  | Angstrom Glovebox | | Angstrom Resistive Evaporator |  |  |  | The Angstrom Amod e-beam chamber is a versatile deposition tool. Capabilities include: 6-pocket e-beam evaporation, 2 resistive thermal evaporation, and sputter deposition using Ar or O2. Substrate may be rotated and heated. Chamber opens either to air or nitrogen-filled glovebox for transport to spin coater.
| Nitrogen-filled glovebox that contains a spin coater and vacuum oven. Glovebox is connected to Angstrom evaporator chambers for transport in an oxygen-free environment
| The Angstrom Amod resistive evaporator has 6 resistive thermal evaporation sources. Substrate can be rotated during deposition. The chamber may be opened to air or a nitrogen-filled glovebox.
| | CVD Furnace | | E-Beam Evaporator | | Microwave Plasma CVD |  |  |  | The Lindberg Blue M furnace has a 1100 oC maximum temperature. Available gases are Ar, CH4, and H2. Tube pressure and gas flow rates are controllable.
| - 6kW E-beam Power Supply
- Load-lock system
- Applications: refractory metals, dielectrics, alloys
- Learn more here
| - 2.45 GHz micro-wave source 1.5 kW
- 5 kW water cooled induction heater stage (750° C)
- Chamber pressure control (1-400 torr)
- CH4, H2, N2, O2 available with MFC
- DC bias on substrate holder up to 200 V
- Applications: nanocrystalline Diamond, microcrystalline diamond
- Learn more here
| | Thermal Furnace | | | | |  | | | The MTI OTF-1200X is a two zone furnace capable of 1100o C max. temperature. Process gases are: O2, H2, CH4, Ar. Max tube size is 100mm OD (95mm ID)
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