Click to return to the VINSE homepage
Facilities:

Nano-Carbon Laboratory
Lab Director: Professor J.L. Davidson (615) 343-7886
Lab Contact: Dr. Bo Choi bo.choi@vanderbilt.edu or (615) 343-6720, 6200 Stevenson Center

Carbon-compound nanostructure synthesis, design, and fabrication of nanoelectronic devices for power and speed applications.

Instruments

E-Beam EvaporatorMicrowave Plasma CVDThermal Furnace (Future)
E-Beam EvaporatorMicrowave Plasma CVDThermal Furnace (Future)

  • 6kW E-beam Power Supply
  • Load-lock system
  • Applications: refractory metals, dielectrics, alloys
  • Learn more here


  • 2.45 GHz micro-wave source 1kW
  • Induction heater stage (750° C)
  • Chamber pressure control (1-400 torr)
  • CH4, H2, N2, O2 available with MFC
  • Extendibility to ECR mode
  • Applications: nanocrystalline Diamond, Carbon Nanotube, nano CNx
  • Learn more here


  • Tube furnaces for oxidation and diffusion
  • Applications: oxide, nitride, CNTs


 
Vanderbilt University