Facilities: Core Laboratories    Biomolecular Nano-Structure Laboratory    Electron Optics Laboratory    Nano-Carbon Laboratory    Nano-Optics Laboratory    Nanocrystal Fabrication Laboratory    Silicon Integration LaboratoryAffiliated Laboratories    Ion Beam Analysis Laboratory

Nano-Carbon Laboratory
Lab Director: Professor J.L. Davidson (615) 343-7886
Lab Contact: Dr. Bo Choi bo.choi@vanderbilt.edu or (615) 343-6720, 6200 Stevenson Center

Carbon-compound nanostructure synthesis, design, and fabrication of nanoelectronic devices for power and speed applications.

Instruments

E-Beam Evaporator		Microwave Plasma CVD		Thermal Furnace (Future)
6kW E-beam Power Supply Load-lock system Applications: refractory metals, dielectrics, alloys Learn more here		2.45 GHz micro-wave source 1kW Induction heater stage (750° C) Chamber pressure control (1-400 torr) CH4, H2, N2, O2 available with MFC Extendibility to ECR mode Applications: nanocrystalline Diamond, Carbon Nanotube, nano CNx Learn more here		Tube furnaces for oxidation and diffusion Applications: oxide, nitride, CNTs