The Digital Instruments Nanoscan III AFM performs high resolution imaging of nanostructured devices by mapping the interaction of a sharp probe scanned across surface features at near atomic resolution.
Three dimensional sculpting of nano-structured surfaces via the removal of material using the direct interaction of a computer controlled Ga ion beam with solid surfaces. Learn more here.
Heidelberg Instruments uPG 101 micro pattern generator
The Karl Suss MA6 with video backside alignment is currently configured for 4 in wafer and 5 in mask.
Manufactured by PVD Products, the EPION 3000 is a versatile tool for thin film and nanocyrstal growth. The target material is ablated with a laser; the plume deposits material on a substrate. Learn more here.
The Brewer Science Cee 200CB is a combination spin-bake tool for coating and curing of photoresist. Spinner features: chucks for large and small samples, manual photoresist dispensing, 6000 rpm max. spin speed. Bake plate feature: 300C max. temperature