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Nano-Optics Laboratory
Lab Director: Professor Richard F. Haglund, Jr. (615) 343-7263
Lab Contact: Dr. Anthony B. Hmelo a.hmelo@vanderbilt.edu or (615) 343-7212, 5622 Stevenson Center A laboratory for the fabrication and characterization of nano-patterned surfaces, films, and devices employing optical and ion beam methods. Instruments | AFM - Atomic Force Microscope |  | FIB - Focused Ion Beam Microscope | | Optical Mask Aligner |  |  |  | The Digital Instruments Nanoscan III AFM performs high resolution imaging of nanostructured devices by mapping the interaction of a sharp probe scanned across surface features at near atomic resolution.
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Three dimensional sculpting of nano-structured surfaces via the removal of material using the direct interaction of a computer controlled Ga ion beam with solid surfaces. Learn more here.
| The Karl Suss MA6 with video backside alignment is currently configured for 4 in wafer and 5 in mask.
| | PLD - Pulsed Laser Deposition System | | Spin Bake Unit | | |  |  | | Manufactured by PVD Products, the EPION 3000 is a versatile tool for thin film and nanocyrstal growth. The target material is ablated with a laser; the plume deposits material on a substrate. Learn more here.
| Coater-Bake Plate System: The Brewer Science Cee® 200CB
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