High Bandwidth, Hot Gas and Liquid, Rotary Proportional Valves

These valves enable high-bandwidth proportional control of cold gas, hot gas, and/or liquid flow in relatively low-cost packages. With regard to 2-way liquid valves, there are no comparable products on the market (i.e., commercially available valves in this size range are on/off valves, which do not provide adequate control resolution for many applications). With regard to gas valves, all known cold gas 3-way and 4-way servovalves are linearly actuated, which increases cost and size and decreases performance relative to our designs. Further, there are no hot gas control valves in this size category on the market.

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U.S. Patent: 7,322,375: High bandwidth rotary servo valves