Direct Laser and Ultraviolet Lithography of Porous Silicon Photonic Crystal Devices
- Category:
We have developed a technique to process photolithographically porous silicon heterostructures and photonic crystal architectures, using laser and ultraviolet light exposure and a subsequent alcoholic bath treatment. This technique would be the first method to process directly the optical properties of porous silicon multilayers, heterostructures, and photonic crystal architectures.
Inventors:
Heungman Park
James Dickerson
Alex Stramel
David Harju
Sharon Weiss
Licensing manager:
Ashok Choudhury




